Importance

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Abstract

A container opening-closing apparatus 1 includes at least a dock plate 31 for supporting and positioning a container 10 capable of accommodating a plurality of semiconductor wafers 14; a dock-moving mechanism 30 for moving the dock plate 31 between a container transfer position and a work position where a container door 13 is attached and detached; a port door 23 including an attaching-detaching mechanism for attaching and detaching the container door 13 and a holding mechanism for holding the container door 13; a port-door advancing-retracting mechanism for horizontally moving the port door 23; a port-door elevating mechanism for vertically moving the port door 23 with the container door 13 held thereby so as to store the container door 13; and a port plate 21 having an opening closed by the port door 23, wherein the dock-moving mechanism 30 includes stop position changing means for changing the stop position of the dock plate 31 to a desired position.

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First Claim