Method, system and medium for controlling manufacture process having multivariate input parameters

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United States of America Patent

PATENT NO 7966087
APP PUB NO 20080021571A1
SERIAL NO

11888363

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Abstract

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A method, system, and medium of modeling and/or for controlling a manufacturing process is disclosed. In particular, a method according to embodiments of the present invention includes calculating a set of predicted output values, and obtaining a prediction model based on a set of input parameters, the set of predicted output values, and empirical output values. Each input parameter causes a change in at least two outputs. The method also includes optimizing the prediction model by minimizing differences between the set of predicted output values and the empirical output values, and adjusting the set of input parameters to obtain a set of desired output values to control the manufacturing apparatus. Obtaining the prediction model includes transforming the set of input parameters into transformed input values using a transformation function of multiple coefficient values, and calculating the predicted output values using the transformed input values.

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Patent Owner(s)

  • APPLIED MATERIALS, INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Entin, Efim Jersusalem, IL 7 129
Fisher, Yossi Jerusalem, IL 12 216
Kokotov, Yuri Maaleh Adumim, IL 18 316
Paik, Young Jeen Campbell, US 6 116
Sarel, Shalomo Maaleh Michmas, IL 2 46
Schwarm, Alexander T Austin, US 35 1043
Seror, Jacques Jerusalem, IL 7 162
Shanmugasundram, Arulkumar P Sunnyvale, US 18 653

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