Optical Member And Manufacturing Method Thereof
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United States of America Patent
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N/A
Issued Date -
Feb 14, 2008
app pub date -
Mar 31, 2005
filing date -
Mar 31, 2004
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
An optical member utilizing diffraction, which comprises a substrate having a fine structure comprising microstructures with an interval of 50-1,000 nm between the adjacent microstructures on a substrate surface, wherein the substrate has a surface layer portion comprising a region containing fluorine atoms in an amount larger than that in the inner layer portion thereof. The microstructures are preferably micro-protrusions each tapering toward the tip in the direction perpendicular to the substrate surface. The optical member is manufactured by a method comprising a step of exposing the surface of the substrate having a fine structure comprising microstructures with an interval of 50-1,000 nm between the adjacent microstructures to an atmosphere containing a fluorine gas.
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