MEMS SWITCH
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United States of America Patent
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Issued Date -
Feb 28, 2008
app pub date -
Jul 18, 2007
filing date -
Aug 25, 2006
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A Micro-Electro-Mechanical System (MEMS) switch includes: a substrate; a fixed electrode provided on the substrate; and a beam fixed to the substrate and including a movable electrode disposed to face the fixed electrode. The beam is capable of being bent and displaced in a direction of the substrate to allow the movable electrode to directly contact with the fixed electrode. At least one of the fixed electrode and the movable electrode contains Au, and the other contains at least one metal selected from a group consisting of Ir, Rh, Os, Ru, Re and Te as a main component.
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