Importance

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Abstract

Disclosed herein are a sheet-like probe that permits forming a front-surface electrode part small in diameter and surely achieving a stable electrically connected state even to a circuit device, on which electrodes have been formed at a small pitch, and prevents the electrode structures from falling off from an insulating film to achieve high durability, and a production process and applications thereof. The sheet-like probe of the invention has a contact film obtained by arranging, in a flexible insulating film, a plurality of electrode structures extending through in a thickness-wise direction of the insulating film in a state separated from one another in a plane direction of the insulating film, wherein each of the electrode structures is exposed to the surfaces of the insulating film and composed of a front-surface electrode part projected from a front surface of the insulating film, a back-surface electrode part exposed to a back surface of the insulating film, a short circuit part directly joined to the front-surface electrode part and the back-surface electrode part for electrically connecting them and extending in a thickness-wise direction of the insulating film, and a holding part formed at a proximal end portion of the front-surface electrode part and extending in the plane direction of the insulating film, and at least a part of the holding part is embedded in the insulating film.

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First Claim