Ethylene terephthalate polymer retaining ring for a chemical mechanical polishing head

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United States of America Patent

APP PUB NO 20080051011A1
SERIAL NO

11542303

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Abstract

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Embodiments of a retaining ring for use with a chemical mechanical polishing process with a body including a polyethylene terephthalate polymer or polymer including ethylene terephthalate monomers are disclosed.

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Patent Owner(s)

Patent OwnerAddress
EBARA TECHNOLOGIES INC51 MAIN AVENUE SACRAMENTO CA 95838

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Lao, Peter Elk Grove, CA 4 35
Moloney, Gerard Stephen Sacramento, CA 3 30

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