Radiation pulse energy control system, lithographic apparatus and device manufacturing method
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United States of America Patent
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Dec 1, 2009
Grant Date -
Mar 6, 2008
app pub date -
Sep 5, 2006
filing date -
Sep 5, 2006
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Abstract
A system for controlling the energy of radiation pulses. A detector monitors energy of the pulses and an optical shutter trims the radiation pulses after a suitable optical delay line. The accuracy of the control of the energy of the radiation pulses can be improved by matching a rate of response of the radiation detector to a rate of response of the optical shutter.
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