Support structures for free-standing electromechanical devices
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United States of America Patent
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Nov 16, 2010
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app pub date -
Jun 28, 2006
filing date -
Jun 28, 2006
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Abstract
A microelectromechanical (MEMS) device includes a functional layer including a first material, a deformable layer including a second material different from the first material, and a connecting element including the first material. The connecting element is mechanically coupled to the deformable layer and the functional layer. The connecting element and the deformable layer form an interface between the first material and the second material. The interface is spaced from the functional layer.
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