HIGH RESOLUTION SPATIAL LIGHT MODULATION
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United States of America Patent
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Issued Date -
Mar 13, 2008
app pub date -
Nov 7, 2007
filing date -
Oct 23, 2003
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
Methods and apparatus for providing a high-resolution spatial light modulator. A spatial light modulator includes a cell that includes: a substrate portion; a first support post and a second support post, each having a top surface; and a micro mirror. The micro mirror includes a bottom layer that includes a hinge member having a longitudinal axis, a width across the longitudinal axis, a first end on the longitudinal axis, and a second end on the longitudinal axis. The first end and second end is secured to the first support post and the second support post, respectively. The hinge member has a same thickness of the bottom layer, wherein the width of the hinge member is greater than a thickness of the bottom layer.
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