Processing apparatus with a chamber having therein a high-corrosion-resistant sprayed film
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United States of America Patent
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app pub date -
Oct 31, 2007
filing date -
Dec 10, 1999
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Abstract
A processing apparatus of the present invention has a mounted chamber holding a semiconductor wafer and having members for work-processing the substrate under any of heating, plasma and process gas or a combination of them, in which a film of Al.sub.2O.sub.3 and Y.sub.2O.sub.3 is formed on an inner wall surface of the chamber and on those exposed surface of the members within the chamber and has a high-corrosion resistance and insulating property and, when the process gas is introduced onto a processing surface of a semiconductor wafer and diffused into it, any product is less liable to be deposited on a plasma generation area and on those members held within the chamber.
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