Supporting apparatus, exposure apparatus, and device manufacturing method
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United States of America Patent
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Oct 19, 2010
Grant Date -
Mar 27, 2008
app pub date -
Sep 11, 2007
filing date -
Sep 22, 2006
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A supporting apparatus supports a movable element by a bearing. The apparatus has a moment reducing unit that exerts a force on a portion of the movable element, which is different from a portion supported by the bearing. The moment reducing unit reduces a moment that acts on the movable element when the portion of the movable element, which is supported by the bearing, changes as the movable element moves. This stabilizes the attitude of the movable element.
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