MICRO DEVICES HAVING ANTI-STICTION MATERIALS
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United States of America Patent
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N/A
Issued Date -
Mar 27, 2008
app pub date -
Aug 25, 2006
filing date -
Aug 25, 2006
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
A method for fabricating a micro structure includes forming a first structure portion on a substrate; disposing a sacrificial material over the first structure portion; depositing a layer of a first structural material over the sacrificial material and the substrate; removing at least a portion of the sacrificial material to form a second structure portion in the layer of the first structural material, and forming a carbon layer on a surface of the second structure portion or on a surface of the first structure portion to prevent stiction between the second structure portion and the first structure portion. The second structure portion is connected with the substrate and is movable between a first position in which the second structural portion is separated from the first structure portion and a second position in which the second structure portion is in contact with the first structure portion.
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