Generation of Monochromatic and Collimated X-Ray Beams

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United States of America Patent

APP PUB NO 20080075229A1
SERIAL NO

11862537

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Abstract

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A compact x-ray source includes an electron beam source with a metallic film on a diamond window. The metallic film, which may be copper or scandium, absorbs the electron beams and produces k-alpha x-rays. The diamond window is a single crystal of diamond with a crystallographic orientation to diffract the x-rays, thereby producing a monochromatic and well collimated x-ray beam. The orientation of the crystal lattice may be configured to produce multiple x-ray beams. A plurality of electron beam sources may also be used to generate multiple x-ray beams. A detector is used to receive the x-ray beam after it interacts with a sample to be measured.

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Patent Owner(s)

Patent OwnerAddress
NANOMETRICS INCORPORATED1550 BUCKEYE DRIVE MILPITAS CA 95035

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ryan, Thomas W Bend, OR 6 664

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