Importance

Loading Importance Indicators...

Abstract

A container 3 airtightly stores articles, such as semiconductor wafers and liquid-crystal display panels, which are required to be transported with their surface kept uncontaminated. A container transport apparatus is used to transport the container 3 between a plurality of processing apparatuses 1-n within a bay area. The container transport apparatus includes a conveyor 5, which is arranged in a ceiling space within the bay area along a direction of arrangement of the plurality of processing apparatuses 1-n and which is adapted to move the container 3 in a state where the container 3 is placed on a pallet 6. The container transport apparatus also includes a lifting apparatus 7, which is provided for each load port 4 of the plurality of processing apparatuses 1-n disposed under the conveyor 5 and which is adapted to lift and lower the container 3 between the load port 4 and the conveyor 5, and a pallet insertion/removal means 20 for inserting the pallet 6 into a space above the conveyor 5 and removing the pallet 6 therefrom.

Loading the Abstract Image...

First Claim