Batch reaction chamber employing separate zones for radiant heating and resistive heating
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United States of America Patent
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Issued Date -
Apr 3, 2008
app pub date -
Sep 29, 2006
filing date -
Sep 29, 2006
priority date (Note) -
Abandoned
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Abstract
A reactor for processing a plurality of workpieces including a support for holding the plurality of workpieces, a first processing zone, one or more radiant heating elements adapted to heat a plurality of workpieces positioned in the first processing zone, a second processing zone, one or more resistive heating elements adapted to heat a plurality of workpieces positioned in the second processing zone, and an apparatus for moving the support between the first processing zone and the second processing zone.
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