Capacitive semiconductor sensor
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United States of America Patent
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Apr 17, 2012
Issued Date -
N/A
app pub date -
Jul 31, 2007
filing date -
Oct 18, 2006
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A capacitive semiconductor sensor includes a sensor chip, a circuit chip, a plurality of bumps, and a plurality of dummy bumps. The sensor chip includes a dynamic quantity detector, which has a detection axis in one direction. The circuit chip includes a signal processing circuit. The sensor chip and the circuit chip are coupled by flip-chip bonding through the plurality of bumps. Furthermore, the sensor chip and the circuit chip are mechanically coupled through the plurality of dummy bumps.
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