Methods and systems to compensate for a stitching disturbance of a printed pattern

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 7630054
APP PUB NO 20080094595A1
SERIAL NO

12000522

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Abstract

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A method and system are provided of using a patterning device. An exemplary method includes performing a first exposure of a surface corresponding to image data, determining an image deficiency within a region of the first image, adjusting the image data to compensate for the image deficiency, and performing a second exposure of the surface corresponding to the adjusted image data during a second pass of the patterning device with respect to the surface. The first exposure occurs during a first pass of the patterning device with respect to the surface to produce a first image on the surface.

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Patent Owner(s)

Patent OwnerAddress
ASML HOLDING N VP O BOX 324 VELDHOVEN 5500 AH

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bleeker, Arno Westerhoven , NL 14 101
Cebuhar, Wenceslao A Norwalk , US 21 165
Kreuzer, Justin Trumbull , US 14 481
Latypov, Azat Danbury , US 31 198
Vladimirsky, Yuli Weston , US 36 477

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