Methods and systems to compensate for a stitching disturbance of a printed pattern

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United States of America Patent

PATENT NO 7773199
APP PUB NO 20080094596A1
SERIAL NO

12000523

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Abstract

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A method and system are provided of using a patterning device. An exemplary method includes defining a first region on a surface, the first region being associated with a first element of the patterning device, defining a second region on the surface, the second region being associated with a second element of the patterning device, activating the first element to expose the overlapping region, and deactivating the second element when the first element is active. The first region and the second region overlap in an overlapping region.

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Patent Owner(s)

  • ASML HOLDING N.V.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bleeker, Arno Westerhoven, NL 14 100
Cebuhar, Wenceslao A Norwalk, US 21 164
Kreuzer, Justin Trumbull, US 14 480
Latypov, Azat Danbury, US 30 194
Vladimirsky, Yuli Weston, US 36 463

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