Imprint Lithography Template Having a Feature Size Under 250 nm
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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Issued Date -
Apr 24, 2008
app pub date -
Jun 11, 2007
filing date -
Oct 12, 2000
priority date (Note) -
Abandoned
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Abstract
The present invention includes a template comprising a plurality of protrusions and a plurality of recessions with a distance between a zenith of any of the plurality of protrusions and a nadir of any one of the plurality of recessions being less than 250 nm.
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