Calibration of a substrate handling robot
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United States of America Patent
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Issued Date -
Apr 24, 2008
app pub date -
Oct 23, 2007
filing date -
Oct 23, 2006
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
A method of calibrating a robot in a processing system is provided. The method includes removably coupling a distance sensor to an end effector of the robot and causing the distance sensor to measure a distance from the sensor to a substrate support. Then it is determined whether the distance meets or is within a selected threshold. Robot joint positions are recorded when the distance meets or is within the selected threshold.
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