High sensitivity microsensors based on flexure induced frequency effects
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United States of America Patent
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Feb 23, 2010
Grant Date -
May 1, 2008
app pub date -
May 24, 2007
filing date -
Nov 1, 2006
priority date (Note) -
Expired
status (Latency Note)
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Abstract
Acoustic sensing utilizing a cantilever structure coupled about at least one side of said cantilever to a base substrate, wherein said cantilever includes a piezoelectric section and has at least one acoustic wave device on a portion of the cantilever, wherein a flexure of the cantilever produces force-frequency effects measurable by the acoustic wave device. According to one embodiment, the cantilever sensor uses the flexure-frequency effect as measured by an acoustic wave device to sense a target matter. According to one embodiment, a sensing material is disposed on at least a portion of at least one surface of the cantilever.
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