MICRO MIRRORS WITH HINGES
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United States of America Patent
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Issued Date -
May 1, 2008
app pub date -
Oct 27, 2006
filing date -
Oct 27, 2006
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
A micro mirror device includes a hinge supported by a substrate and a mirror plate tiltable around the hinge. The hinge can include an alloy selected from the group consisting of a titanium-nickel alloy having a titanium composition between about 30% to 70%, a titanium-aluminum alloy having a titanium composition between about 30% to 70%, an aluminum-copper alloy having a copper composition between about 5% to 20%, and an aluminum titanium nitride having a nitrogen composition in the range of 0 to about 15%.
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