Reduced capacity carrier, transport, load port, buffer system
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United States of America Patent
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app pub date -
Apr 18, 2007
filing date -
Nov 7, 2005
priority date (Note) -
Abandoned
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Abstract
A semiconductor workpiece processing system having at least one processing apparatus for processing workpieces, a primary transport system, a secondary transport system and one or more interfaces between first transport system and second transport system. The primary and secondary transport systems each have one or more sections of substantially constant velocity and in queue sections communicating with the constant velocity sections.
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