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Abstract

A method is proposed for coating a base body which has at lest one inner passage (101, 102), in which method the coating takes place by means of chemical deposition from the vapour phase, with the base body (10) being arranged on a holding device (3) in a reaction space (21) of a reactor vessel (2) with a process gas being delivered from an external source (7), the process gas being added to an internal generator (4) in the reaction container (2), in which the reactivity of the process gas is increased with the aid of a reactivity changing material and the process gas is conveyed out of the internal generator (4) into the reaction space (21). The process gas is sucked out of the reaction space (21) through the at least one inner passage (101, 102) and through the holding device (3) to an outlet (5) of the reactor vessel (2). Further an apparatus suitable for the method is proposed.

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First Claim