Low voltage micro mechanical device
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United States of America Patent
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Mar 24, 2009
Grant Date -
May 29, 2008
app pub date -
Nov 8, 2006
filing date -
Nov 8, 2006
priority date (Note) -
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Abstract
Methods for driving a plurality of MEMS devices in an apparatus are described. A voltage pulse is applied to an electrode or a structure portion of a MEMS device. The electrode is on the substrate underneath the structure portion. At least two MEMS devices of the plurality of MEMS devices have different threshold voltages, and the threshold voltage is the minimum voltage required to move the structure portion. A bias voltage is applied to whichever of the electrode or the structure portion of the MEMS device does not have the voltage pulse applied thereto. The bias voltage and the voltage pulse are capable of moving the structure portion of the MEMS device that has the higher threshold voltage of the different threshold voltages.
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