SIMPLIFIED MANUFACTURING PROCESS FOR MICRO MIRRORS
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United States of America Patent
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N/A
Issued Date -
May 29, 2008
app pub date -
Nov 28, 2006
filing date -
Nov 28, 2006
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
A micro mirror includes a hinge support post on the substrate, a hinge connection post on the hinge support post, wherein the hinge connection post comprises a bottom layer connected to the hinge support post and a side layer surrounding a cavity in the center of the hinge connection post, a hinge component connected to the side layer of the hinge connection post; and a mirror plate configured to tilt around the hinge component.
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