Semiconductor Device Having a Random Grained Polysilicon Layer and a Method for its Manufacture

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United States of America Patent

SERIAL NO

11746366

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Abstract

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A semiconductor device having a random grained polysilicon layer and a method for its manufacture are provided. In one example, the device includes a semiconductor substrate and an insulator layer on the substrate. A first polysilicon layer having a random grained structure is positioned above the insulator layer, a semiconductor alloy layer is positioned above the first polysilicon layer, and a second polysilicon layer is positioned above the semiconductor alloy layer.

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Patent Owner(s)

Patent OwnerAddress
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD8 LI-HSIN RD 6 HSINCHU SCIENCE PARK HSINCHU 300-78

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chen, Chia-Lin Hsin-Chu, TW 51 421
Chen, Shih-Chang Hsin-Chu, TW 298 2340
Yao, Liang-Gi Hsin-Chu, TW 90 899

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