Atmospheric Processing Using Microwave-Generated Plasmas

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United States of America Patent

APP PUB NO 20080129208A1
SERIAL NO

11667180

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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An atmospheric plasma processing system is presented. In accordance with embodiments of the present invention, an atmospheric pressure plasma microwave processing apparatus includes a processing area or chamber wherein parts are processed; at least one multi-mode microwave reactor coupled to receive parts for processing; at least one magnetron coupled to at least one multi-mode microwave reactor to provide microwave energy; and a delivery system coupled to at least one multi-mode microwave reactor to deliver the parts into and out of at least one reactor, wherein a plasma can be generated at atmospheric pressure and provided to the parts in at least one multi-mode microwave reactor.

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Patent Owner(s)

Patent OwnerAddress
BTU INTERNATIONAL INC23 ESQUIRE ROAD N BILLERICA MA 01862

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cherian, Kuruvilla Rochester Hills, MI 2 49
Dougherty, Mike L Rochester Hills, MI 1 2
Kumar, Devendra Rochester Hills, MI 47 1362
Kumar, Satyendra Troy, MI 50 950

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