NON-CONTACT MICRO MIRRORS
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United States of America Patent
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N/A
Issued Date -
Jun 19, 2008
app pub date -
Dec 13, 2006
filing date -
Dec 13, 2006
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
A micro mirror device includes a hinge supported by a substrate and a mirror plate tiltable around the hinge. The hinge includes a length longer than 1 micron, a thickness less than 500 nanometers, and a width less than 1000 nanometers. The hinge can produce an elastic restoring force on the mirror plate when the mirror plate tilts away from an un-tilted position.
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