Dry tuned gyroscope utilizing silicon micro-electro-mechanical hinge, gimbal and rotor
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United States of America Patent
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Issued Date -
Jun 26, 2008
app pub date -
Dec 21, 2006
filing date -
Dec 21, 2006
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A gyroscope assembly comprises a shaft and a flexure device mounted on the shaft. The flexure device includes three concentric plates. A first pair of diametrically opposed hinges connected the inner plate and the central plate. A second pair of diametrically opposed hinges spaced 90.degree. apart from the first pair of hinges connects the outer plate and the inner plate. The hinges define two perpendicular sensing axis and form a gimbal so that rotations of the outer plate about the sensing axes may be detected.
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