PLASMA POWER SUPPLY CONTROL SYSTEM AND METHOD
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United States of America Patent
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Issued Date -
Jun 26, 2008
app pub date -
Dec 6, 2007
filing date -
Dec 6, 2006
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A plasma power supply controller jointly monitors a plurality of plasma power supply devices of one or more electrical loads. The controller includes at least one signal input, at least one signal output connected to at least one first logic switching device configured to actuate a first power interrupter of at least one of the plasma power supply devices, and a safety switching device. The at least one signal input is configured to receive indication signals of at least one indication device. The safety switching device is configured to detect a state or a state change of at least one of the indication devices and to interrupt the current supply of at least one of the plasma power supply devices using the first logic switching device upon a detection of a predetermined state or upon a detection of a state change of at least one of the indication devices.
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