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Abstract

A method of manufacturing an integrated circuit on semiconductor substrates. The method includes providing a semiconductor substrate characterized by a first lattice with a first structure and a first spacing. The semiconductor substrate has an overlying film of material with a second lattice with a second structure and a second spacing. Preferably, the second spacing placing the film of material in either a tensile or compressive mode across the entirety of the film of material relative to the semiconductor substrate with the first structure and the first spacing. The method includes processing the film of material to form a first region and a second region within the film of material. The first region and the second region are characterized by either the tensile or compressive mode. Preferably, both the first and second regions in their entirety are characterized by either the tensile or compressive mode. The method includes processing the first region of the film of material while maintaining the second region characterized by either the tensile or the compressive mode to form an opposite characteristic from the second region. The opposite characteristic is a tensile mode if the second region is in the compressive mode and the opposite characteristic is the compressive mode if the second region is in the tensile mode.

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First Claim