ENVIRONMENTAL ISOLATION SYSTEM FOR FLAT PANEL DISPLAYS

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United States of America Patent

APP PUB NO 20080156679A1
SERIAL NO

11953020

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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The present invention generally comprises a system for FPD material storage and transport. The FPD system may contain environmental protection, material tracking and/or workstation loading capabilities. One of the components of the system includes a transportable, sealable container. Another component of the system includes a sealable load port against which a container is docked so that the substrates may be processed.

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First Claim

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Patent Owner(s)

Patent OwnerAddress
MURATEC AUTOMATION CO LTDKYOTO JAPAN KYOTO-SHI KYOTO

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bonora, Anthony C Fremont, CA 117 6049
Gould, Richard Fremont, CA 16 129
Pharand, Michel Fremont, CA 24 215

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