Interferometric modulator array with integrated MEMS electrical switches
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United States of America Patent
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Dec 28, 2010
Grant Date -
Jul 3, 2008
app pub date -
Mar 17, 2008
filing date -
Sep 27, 2004
priority date (Note) -
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Abstract
An interferometric modulator array is integrated with collapsible cavity MEMS electrical switches. The electrical switches may have similar physical geometry as the display elements. The switches may form row or column select functions for the display.
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