SURFACE ACOUSTIC WAVE GAS SENSOR WITH SENSITIVE GETTER LAYER AND PROCESS FOR ITS MANUFACTURE
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United States of America Patent
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app pub date -
Apr 19, 2007
filing date -
Oct 22, 2004
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Abstract
A surface acoustic wave gas sensor, in particular a vacuum or hydrogen sensor, includes a piezoelectric substrate (1) on which at least one layer of a gas-sensitive material (6) is arranged between two inter-digital transducers (2, 3). The gas-sensitive material includes a getter material, such that the molecules sorbed by this getter material can vary the frequency of a signal transmitted between the two transducers (2, 3). A process for manufacturing this sensor is also provided using a mask to deposit the gas-sensitive material between the transducers, preferably by sputtering.
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