GAS SUPPLY PIPING SYSTEM AND METHOD FOR REPLACING PURIFIER
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United States of America Patent
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N/A
Issued Date -
Jul 24, 2008
app pub date -
Jan 22, 2007
filing date -
Jan 22, 2007
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
A gas supply piping system suitable for transporting a gas to a machine terminal from a gas supply terminal is provided, which includes a main supply pipe, a plurality of branch supply pipes, a plurality of purifiers, a plurality of first valves and a backup piping. The main supply pipe is connected to the gas supply terminal. The branch supply pipes are connected the main supply pipe and the machine terminal respectively. The purifiers are connected to the branch supply pipes respectively. The first valves are connected to the branch supply pipes respectively and located between the purifiers and the gas supply terminal. The backup piping is connected to the branch supply pipes and disposed between the purifiers and the machine terminal.
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