Glass Substrate Storage Case, Glass Substrate Transfer Apparatus, Glass Substrate Management Apparatus, Glass Substrate Distribution Method , Sealing Member, And Sealing Structure
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United States of America Patent
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N/A
Issued Date -
Jul 24, 2008
app pub date -
Sep 9, 2005
filing date -
Sep 10, 2004
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
To provide a glass substrate storage case capable of preventing quality deterioration of a glass substrate, a glass substrate transfer apparatus automatically transferring a glass substrate from the glass substrate storage case to another case; a glass substrate management apparatus managing glass substrates individually, a glass substrate distribution method for trading a glass substrate while storing the glass substrate in a specialized glass substrate storage case, a sealing member improving a sealing effect, and a sealing structure using the sealing member. The glass substrate storage case includes: a bottom member 12 on which a reticle R is placed; a cover member 20 overlaid on the bottom member 12 so as to cover the reticle R placed on the bottom member 12 and to form a space portion between the cover member 20 and the bottom member 12; a sealing member 18 provided in the bottom member 12 and/or the cover member 20 to keep the space portion airtight in a state where the cover member 20 is overlaid on the bottom member 12; and hook members 24 provided on the cover member 20 and hooked to the bottom member 12 to maintain the state where the cover member 20 is overlaid on the bottom member 12.

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Family

- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
Patent Owner | Address | |
---|---|---|
NIPPON VALQUA INDUSTRIES LTD | TOKYO 141-6024 | |
HAKUTO CO LTD | TOKYO |
International Classification(s)
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
---|---|---|---|
Kawashima, Hideaki | Tokyo, JP | 5 | 53 |
Osada, Atsushi | Yamanashi, JP | 23 | 150 |
Umeda, Toshiya | Tokyo, JP | 5 | 72 |
Yoshida, Tsutomu | Nara, JP | 51 | 539 |
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Maintenance Fees
Fee | Large entity fee | small entity fee | micro entity fee | due date |
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Fee | Large entity fee | small entity fee | micro entity fee |
---|---|---|---|
Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |
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