Glass Substrate Storage Case, Glass Substrate Transfer Apparatus, Glass Substrate Management Apparatus, Glass Substrate Distribution Method , Sealing Member, And Sealing Structure

Number of patents in Portfolio can not be more than 2000

United States of America Patent

APP PUB NO 20080173560A1
SERIAL NO

11662266

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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To provide a glass substrate storage case capable of preventing quality deterioration of a glass substrate, a glass substrate transfer apparatus automatically transferring a glass substrate from the glass substrate storage case to another case; a glass substrate management apparatus managing glass substrates individually, a glass substrate distribution method for trading a glass substrate while storing the glass substrate in a specialized glass substrate storage case, a sealing member improving a sealing effect, and a sealing structure using the sealing member. The glass substrate storage case includes: a bottom member 12 on which a reticle R is placed; a cover member 20 overlaid on the bottom member 12 so as to cover the reticle R placed on the bottom member 12 and to form a space portion between the cover member 20 and the bottom member 12; a sealing member 18 provided in the bottom member 12 and/or the cover member 20 to keep the space portion airtight in a state where the cover member 20 is overlaid on the bottom member 12; and hook members 24 provided on the cover member 20 and hooked to the bottom member 12 to maintain the state where the cover member 20 is overlaid on the bottom member 12.

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First Claim

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Patent Owner(s)

Patent OwnerAddress
NIPPON VALQUA INDUSTRIES LTDTOKYO 141-6024
HAKUTO CO LTDTOKYO

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kawashima, Hideaki Tokyo, JP 5 53
Osada, Atsushi Yamanashi, JP 23 150
Umeda, Toshiya Tokyo, JP 5 72
Yoshida, Tsutomu Nara, JP 51 539

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