MEMS device fabricated on a pre-patterned substrate
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United States of America Patent
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Sep 8, 2009
Grant Date -
Aug 14, 2008
app pub date -
Apr 16, 2008
filing date -
Sep 27, 2004
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Abstract
A microelectromechanical systems device fabricated on a pre-patterned substrate having grooves formed therein. A lower electrode is deposited over the substrate and separated by an orthogonal upper electrode by a cavity. The upper electrode is configured to be movable to modulate light.
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