METHOD OF MANUFACTURING A REPLICA MOLD AND A REPLICA MOLD
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United States of America Patent
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Issued Date -
Aug 28, 2008
app pub date -
Aug 27, 2007
filing date -
Feb 27, 2007
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
There are provided a replica mold which is excellent in transferring a pattern of a master mold, and also has notably excellent hardness, transparency, heat resistance and chemical resistance, and a simple and inexpensive method of manufacturing the replica mold. A method of manufacturing a replica mold according to the present invention includes the steps of: applying, to a substrate, a replica mold material containing a polysilane and a silicone compound; pressing a master mold on which a predetermined minute pattern has been formed to the replica mold material which has been applied to the substrate; irradiating energy rays from a side of the substrate while the master mold is contacted by press with the replica mold material; releasing the master mold; and irradiating the replica mold material with energy rays from a side to which the master mold has been pressed.
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