Importance

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Abstract

A silicon microphone includes a silicon microphone device, on which four acoustic transducers are integrated, an integrated circuit device and a package for housing the devices in an inner space defined therein, and the four acoustic transducers have different values of sensitivity and, accordingly, different values of dynamic range; the analog acoustic signals are supplied from the four acoustic transducers to the integrated circuit device, and are converted to digital acoustic signals; the digital acoustic signal output from the acoustic transducers with relatively high sensitivity are normalized with respect to the digital acoustic signal output from the acoustic transducer with lowest sensitivity, and the normalized digital acoustic signals are selectively formed into a composite acoustic signal depending upon the sound pressure of sound waves so that the dynamic range is expanded without sacrifice of high sensitivity in the low sound pressure range.

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First Claim