Detection of resonator motion using piezoresistive signal downmixing
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United States of America Patent
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Jun 30, 2009
Grant Date -
Sep 11, 2008
app pub date -
Feb 24, 2005
filing date -
May 7, 2003
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Abstract
A system containing a micro-mechanical or nano-mechanical device and a method of operating the same is provided. The device includes a resonator and a piezoresistive element connected to the resonator. The method includes AC biasing the piezoresistive element at a first frequency, driving the resonator at a second frequency different from the first frequency, and detecting a mechanical response of the resonator at one or both of a difference frequency and a sum frequency of the first and second frequencies.
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