Importance

Loading Importance Indicators...

Abstract

There is obtained an MOCVD oriented vaporizer which eliminates a phenomenon that thin-film materials are adhered to a portion of the vaporizer near and around a spout thereof. A carrier gas/small amount oxidizing gas supply part supplies a carrier gas, which is supplied through an internally formed gas passage and which contains a material solution, to a vaporization part; a bubble prevention/material solution supply part supplies a material for preventing generation of bubbles of the carrier gas containing the material solution, and the material solution, into the carrier gas; a solvent vaporization restricting/cooling system restricts vaporization of a solvent; and a swirl flow preventing gas supply part supplies a gas for preventing occurrence of swirl flows near a gas outlet of the vaporization part. An atomizing part causes the carrier gas, which contains the material solution and which is ejected from the vaporizer, to be formed into a finely atomized state; and a complete vaporization oriented high performance vaporization tube completely vaporizes the carrier gas ejected from the vaporizer and containing the material solution. This enables long-term usage without clogging and the like, and enables a stable material supply to a reaction part.

Loading the Abstract Image...

First Claim