COBALT CAPPING SURFACE PREPARATION IN MICROELECTRONICS MANUFACTURE

United States of America Patent

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Issued Date
Oct 2, 2008
app pub date
Apr 2, 2008
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Apr 2, 2007

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Abandoned

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Abstract

Cleaning compositions and methods in connection with cobalt-based capping of interconnects in integrated circuit semiconductor devices.

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Patent Owner	Address
ENTHONE INC	350 FRONTAGE ROAD WEST HAVEN CT 06516

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C23G:CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CH....

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Inventor Name	Address	# of filed Patents	Total Citations
Chen, Qingyun	Brandford, CT	39	269
Hurtubise, Richard	Clinton, CT	35	310
Lin, Xuan	Northford, CT	36	416
Paneccasio, Vincent	Madison, CT	15	103

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COBALT CAPPING SURFACE PREPARATION IN MICROELECTRONICS MANUFACTURE

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United States of America Patent

12061498

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