Microelectromechanical device and method utilizing conducting layers separated by stops
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United States of America Patent
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Jun 22, 2010
Grant Date -
Oct 2, 2008
app pub date -
Mar 28, 2007
filing date -
Mar 28, 2007
priority date (Note) -
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Abstract
A microelectromechanical system (MEMS) device includes a reflective element that includes at least one stop member. The device also includes an electrode and an aperture that extends at least partially through the electrode. The aperture has a boundary. The device has an electrically nonconductive surface within the aperture or on a portion of the boundary of the aperture. A support structure separates the reflective element from the electrode. The reflective element can be moved between a first position and a second position. The stop member is spaced from the electrically nonconductive surface when the reflective element is in the first position. A portion of the stop member is in contact with the electrically nonconductive surface when the reflective element is in the second position. The reflective element and the electrode are electrically isolated from each other when the reflective element is in the second position.
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