High vacuum in-situ refining method for high-purity materials and an apparatus thereof
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United States of America Patent
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Jul 13, 2010
Grant Date -
Oct 23, 2008
app pub date -
Apr 11, 2006
filing date -
Sep 28, 2005
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Abstract
The present invention concerns a high vacuum in-situ refining method for high-purity and superhigh-purity materials and the apparatus thereof, characterized in heating the upper part and lower part of crucible separately using double-heating-wires diffusion furnace under vacuum, thereby forming the temperature profile which is high at upper part and low at lower part of crucible, or in reverse during different stages; then heating the crucible in two steps to remove impurities with high saturation vapor pressure and low saturation vapor pressure respectively in efficiency; and obtaining high-purity materials eventually. The whole procedure is isolated from atmosphere, reducing contamination upon stuff remarkably. The present invention could provide products with high-quality and high production capacity, which are stable in performance, therefore is reliable and free from contamination. The present invention is appropriate for manufacture of high-purity and superhigh-purity materials, particularly for manufacture of high-activity high-purity materials.
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