Systems and methods for measuring temperature
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United States of America Patent
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Issued Date -
Oct 23, 2008
app pub date -
Jan 8, 2008
filing date -
Apr 18, 2007
priority date (Note) -
Abandoned
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Abstract
Systems and methods for determining a temperature sensitivity of a MEMS device are disclosed. An exemplary method includes determining a temperature response of a MEMS device at an arbitrary temperature and calibrating the MEMS device based on the temperature response.
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