Thin film battery substrate cutting and fabrication process

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United States of America Patent

PATENT NO 7862627
SERIAL NO

11796487

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Abstract

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A method of fabricating a battery comprises selecting a battery substrate having cleavage planes, and cutting the battery substrate with pulsed laser bursts from a pulsed laser beam to control or limit fracture along the cleavage planes. The pulsed laser beam was also found to work well on thin substrates which are sized less than 100 microns. Before or after the cutting step, a plurality of battery component films can be deposited on the battery substrate. The battery component films include at least a pair of electrodes about an electrolyte which cooperate to form a battery.

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Patent Owner(s)

Patent OwnerAddress
KLA CORPORATIONONE TECHNOLOGY DRIVE MILPITAS CA 95035

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Li, Jianchao El Monte, US 12 282
Makhar, Sandeep Temple City, US 2 133
Nieh, Kai-Wei Monrovia, US 24 1048

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