Alternating current rotatable sputter cathode
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United States of America Patent
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Mar 15, 2011
Grant Date -
Oct 30, 2008
app pub date -
Jul 14, 2008
filing date -
Jun 14, 2001
priority date (Note) -
Expired
status (Latency Note)
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Abstract
The present invention is an alternating current rotary sputter cathode in a vacuum chamber. The apparatus includes a housing containing a vacuum and a cathode disposed therein. A drive shaft is rotatably mounted in the bearing housing. A rotary vacuum seal is located in the bearing housing for sealing the drive shaft to the housing. An at least one electrical contact is disposed between a power source and the cathode for transmittal of an oscillating or fluctuating current to the cathode. The electrical contact between the power source and the cathode is disposed inside of the vacuum chamber, greatly reducing, and almost eliminating, the current induced heating of various bearing, seals, and other parts of the rotatably sputter cathode assembly.
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