Micromachined mass flow sensor and methods of making the same
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United States of America Patent
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Jul 13, 2010
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app pub date -
Apr 3, 2008
filing date -
Feb 2, 2004
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Abstract
A mass flow sensor is supported on an N or P-type silicon substrate with orientation <100>. This mass flow sensor comprises a central thin-film heater and a pair of thin-film heat sensing elements, and a thermally isolated membrane for supporting the heater and the sensors out of contact with the substrate base. The mass flow sensor is arranged for integration on a same silicon substrate to form a one-dimensional or two-dimensional array in order to expand the dynamic measurement range.
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