Method and apparatus for low cost high rate deposition tooling
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United States of America Patent
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Issued Date -
Dec 11, 2008
app pub date -
Jun 5, 2008
filing date -
Jun 5, 2007
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
An apparatus and method for depositing material on an array of substrates. The array of substrates may be moved past one or more sources of deposition material in a first rotational motion. The array of substrates may also be concurrently moved in a second rotational motion. The combination of the first and second rotational motions cause each of the substrates to move about its longitudinal axis without gears and bearings.
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